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New detectors for low-energy BSE
Lalinský, Ondřej ; Schauer, Petr ; Kučera, M. ; Hanuš, M. ; Lučeničová, Z.
Backscattered electrons (BSE) are mostly used to study the specimen’s topography. Nowadays, low energy (units of keV) electron beam imaging is often necessary for example for the research of nanomaterials, biomaterials or semiconductors. Because BSE detectors are mostly non-accelerating or low-accelerating, electrons with approximately the same energy as primary beam (PB) have to be detected. Therefore, BSE detectors need to become optimized for such low-energy electrons. For the scintillation detectors, the biggest problem probably lies in the scintillator. Semiconductor detectors aren’t studied in this work. Cerium activated bulk single crystals of yttrium aluminium garnet (YAG:Ce)Ce(X):Y(3-X)Al(5)O(12) are widely used as scintillators for the detection of high-energy backscattered electrons (BSE). However, commonly used YAG:Ce single crystal strongly loses its light yield (LY) with the decrease of the PB energy. As possible available alternatives for this application, bulk single crystals of yttrium aluminium perovskite (YAP:Ce) Ce(x)Y(1-X)AlO(3) and CRY018 can be predicted. However, similar LY drop can be expected also with these scintillators.
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Performance of YAG:Ce Scintillators for Low-Energy Electron Detectors in S(T)EM
Lalinský, Ondřej ; Bok, Jan ; Schauer, Petr ; Frank, Luděk
Cerium activated single crystals of yttrium aluminium garnet (YAG:Ce) Y3-xCexAl5O12 are widely used as scintillators in electron detectors for S(T)EM. Nowadays, it is sometimes necessary to detect low-energy electrons without post-acceleration. In such cases, extremely sensitive detectors are required that are able to detect even electrons with energies of only hundreds of eV while avoiding charging of the scintillator surface. However, commonly used scintillators strongly lose their light yield with the decrease of the incident electron energy. Moreover, a thinner conductive layer on the scintillator surface has to be used to allow low-energy electrons to pass through. Possible charging of the surface negatively affects its cathodoluminescence (CL) light yield. The low-energy electron excitation takes place closer to the scintillator surface where damage can be expected owing to its preparation, which also reduces the CL light yield. The aim was to study the influence of the scintillator and its conductive layer on the low-energy electron detection efficiency.
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